The photomicrograph shows a diamond MEMS chip and a diamond cantilever integrated into the chip A research team led by the National Institute for Materials Science (NIMS) has successfully developed a high-quality factor diamond cantilever that has an unprecedented highest quality factor (Q) at room temperature. The team also successfully developed the world's first single crystal diamond MEMS sensor chip that can be driven and sensed by electrical signals. These research results will promote the industry's research on diamond MEMS, and its sensitivity and reliability are significantly higher than existing silicon MEMS devices. In MEMS sensors, micro cantilevers (only one end of the cantilever beam) and electronic circuitry are integrated on a single substrate that has been used for gas sensors, mass analysis and scanning microscopy probes. However, for practical applications in a wider range of areas such as disaster prevention and medical care, they require higher sensitivity and reliability. Diamond's elastic constant and mechanical constant are among the highest of all materials, so it is expected to be used in the development of high reliability, high sensitivity MEMS sensors. However, due to its high mechanical hardness, three-dimensional micromachining of diamonds is very difficult. In 2010, the research team developed a manufacturing method called "smart cut" that used an ion beam to micro-process diamond to successfully create a single crystal diamond cantilever. However, due to surface defect problems, the quality factor of such a diamond cantilever has no advantage over existing silicon cantilevers. The research team then developed a new technology that allows atomic etching of the diamond surface. The new etching technology enabled the research team to remove defects on the bottom surface of a single crystal diamond cantilever fabricated using the smart cutting method. The cantilever produced by the new technology exhibits a Q value (a parameter used to measure cantilever sensitivity) of more than 1 million, reaching the highest level in the world. The research team defined a new MEMS device concept: a synchronous integrated cantilever, an electronic circuit that oscillates the cantilever, and an electronic circuit that senses the vibration of the cantilever. In the end, the team developed a single crystal diamond MEMS chip that could be driven by electrical signals and successfully demonstrated its operation for the first time. The chip exhibits extremely high performance and sensitivity and operates at low voltages and temperatures up to 600 °C. These findings accelerate the fundamental research that is critical to the practical application of diamond MEMS chips, developing ultra-high sensitivity, high speed, compact and reliable sensors that differentiate individual molecular mass differences. SS Powder,316L Powder,Steel Powder,Stainless Steel Powder Luoyang Golden Egret Geotools Co., Ltd , https://www.xtclasercladding.com